Dry Etching System Global Market Insights 2025, Analysis and Forecast to 2030, by Manufacturers, Regions, Technology, Application, Product Type

Dry Etching System Market Overview

The global Dry Etching System Market is poised for significant growth from 2025 to 2030, driven by advancements in semiconductor manufacturing and the increasing demand for miniaturized electronic components. Dry etching systems are critical in the fabrication of integrated circuits (ICs), discrete components, optoelectronics, and sensors. The market is expected to grow at a compound annual growth rate (CAGR) of 6.8% during the forecast period, reaching a market size of approximately $8.5 billion by 2030.

Market Size and Growth

The dry etching system market was valued at $5.9 billion in 2025 and is projected to grow to $8.5 billion by 2030. This growth is attributed to the rising demand for advanced semiconductor devices, particularly in the consumer electronics, automotive, and industrial sectors. The Asia-Pacific region is expected to dominate the market, accounting for 45%-50% of the global market share by 2030.

Market Share & Trends Analysis

By Product Type

  • Capacitively Coupled Plasma (CCP) Etching System: This segment held the largest market share in 2025, accounting for 55%-60% of the total market. CCP systems are widely used in the production of ICs and discrete components due to their high precision and efficiency.
  • Inductively Coupled Plasma (ICP) Etching System: The ICP segment is expected to grow at a faster rate, with a projected CAGR of 7.5%-8.5% from 2025 to 2030. ICP systems are gaining traction in advanced applications such as 3D NAND and DRAM manufacturing.

By Key Players

The market is highly competitive, with key players including:

  • Lam Research: Lam Research holds a significant market share of 25%-30%, driven by its innovative product portfolio and strong presence in the semiconductor industry.
  • Applied Materials Inc.: Applied Materials accounts for 20%-25% of the market, with a focus on advanced etching technologies for next-generation devices.
  • Tokyo Electron Ltd.: Tokyo Electron has a market share of 15%-20%, with a strong emphasis on R&D and strategic partnerships.
  • Hitachi, ULVAC, Canon Anelva, AMEC, and NAURA: These companies collectively hold 25%-30% of the market, with a focus on expanding their product offerings and geographic presence.

By Process

  • Reactive Ion Etching (RIE): RIE is the most widely used process, accounting for 50%-55% of the market. It is preferred for its ability to achieve high aspect ratio etching with minimal damage to the substrate.
  • Deep Reactive Ion Etching (DRIE): The DRIE segment is expected to grow at a CAGR of 7.0%-8.0%, driven by the increasing demand for MEMS and 3D ICs.

By Application

  • Integrated Circuits (ICs): The IC segment dominates the market, with a share of 60%-65%. The growth is fueled by the increasing demand for high-performance computing and 5G technologies.
  • Discrete Components: This segment accounts for 15%-20% of the market, with steady growth expected due to the rising demand for power devices and RF components.
  • Optoelectronics: The optoelectronics segment is projected to grow at a CAGR of 6.5%-7.5%, driven by the increasing adoption of LEDs and photonic devices.
  • Sensors: The sensors segment is expected to grow at a CAGR of 7.0%-8.0%, supported by the growing demand for IoT and automotive sensors.

By End-Use

  • Consumer Electronics: The consumer electronics segment holds the largest market share of 40%-45%, driven by the proliferation of smartphones, tablets, and wearable devices.
  • Automotive: The automotive segment is expected to grow at a CAGR of 8.0%-9.0%, fueled by the increasing adoption of electric vehicles and advanced driver-assistance systems (ADAS).
  • Industrial: The industrial segment accounts for 20%-25% of the market, with growth driven by the increasing use of automation and robotics.

By Region

  • Asia-Pacific: The Asia-Pacific region is the largest market, accounting for 45%-50% of the global market share. The region's dominance is attributed to the presence of major semiconductor manufacturers and the increasing demand for consumer electronics.
  • North America: North America holds a market share of 20%-25%, with growth driven by the presence of leading semiconductor companies and the increasing adoption of advanced technologies.
  • Europe: Europe accounts for 15%-20% of the market, with steady growth expected due to the increasing demand for automotive and industrial applications.
  • Rest of the World: The Rest of the World region is expected to grow at a CAGR of 6.0%-7.0%, driven by the increasing adoption of semiconductor technologies in emerging economies.

Market News on Policy and Companies

Recent developments in the dry etching system market include:

  • Policy Changes: Governments worldwide are implementing policies to support the semiconductor industry, including tax incentives and funding for R&D. For example, the U.S. CHIPS Act has allocated $52 billion to boost domestic semiconductor manufacturing.
  • Company News: Key players are investing heavily in R&D and strategic partnerships to strengthen their market position. For instance, Lam Research recently announced a $500 million investment in a new R&D facility focused on advanced etching technologies.

Segment Forecasts (2025 - 2030)

  • Capacitively Coupled Plasma Etching System: This segment is expected to grow at a CAGR of 6.5%-7.5%, driven by the increasing demand for high-precision etching in IC manufacturing.
  • Inductively Coupled Plasma Etching System: The ICP segment is projected to grow at a CAGR of 7.5%-8.5%, supported by the increasing adoption of advanced memory and logic devices.
  • Integrated Circuits (ICs): The IC segment is expected to grow at a CAGR of 7.0%-8.0%, driven by the increasing demand for high-performance computing and 5G technologies.
  • Consumer Electronics: The consumer electronics segment is projected to grow at a CAGR of 6.0%-7.0%, fueled by the proliferation of smartphones, tablets, and wearable devices.

Conclusion

The global Dry Etching System Market is set for robust growth from 2025 to 2030, driven by advancements in semiconductor manufacturing and the increasing demand for miniaturized electronic components. Key players such as Lam Research, Applied Materials Inc., and Tokyo Electron Ltd. are expected to maintain their dominance, while emerging markets in Asia-Pacific and the Rest of the World offer significant growth opportunities. With supportive government policies and continuous innovation, the market is poised to reach $8.5 billion by 2030.


Chapter 1 Executive Summary
Chapter 2 Abbreviation and Acronyms
Chapter 3 Preface
3.1 Research Scope
3.2 Research Sources
3.2.1 Data Sources
3.2.2 Assumptions
3.3 Research Method
Chapter 4 Market Landscape
4.1 Market Overview
4.2 Classification/Types
4.3 Application/End Users
Chapter 5 Market Trend Analysis
5.1 Introduction
5.2 Drivers
5.3 Restraints
5.4 Opportunities
5.5 Threats
Chapter 6 Industry Chain Analysis
6.1 Upstream/Suppliers Analysis
6.2 Dry Etching System Analysis
6.2.1 Technology Analysis
6.2.2 Cost Analysis
6.2.3 Market Channel Analysis
6.3 Downstream Buyers/End Users
Chapter 7 Latest Market Dynamics
7.1 Latest News
7.2 Merger and Acquisition
7.3 Planned/Future Project
7.4 Policy Dynamics
Chapter 8 Trading Analysis
8.1 Export of Dry Etching System by Region
8.2 Import of Dry Etching System by Region
8.3 Balance of Trade
Chapter 9 Historical and Forecast Dry Etching System Market in North America (2020-2030)
9.1 Dry Etching System Market Size
9.2 Dry Etching System Demand by End Use
9.3 Competition by Players/Suppliers
9.4 Type Segmentation and Price
9.5 Key Countries Analysis
9.5.1 United States
9.5.2 Canada
9.5.3 Mexico
Chapter 10 Historical and Forecast Dry Etching System Market in South America (2020-2030)
10.1 Dry Etching System Market Size
10.2 Dry Etching System Demand by End Use
10.3 Competition by Players/Suppliers
10.4 Type Segmentation and Price
10.5 Key Countries Analysis
10.5.1 Brazil
10.5.2 Argentina
10.5.3 Chile
10.5.4 Peru
Chapter 11 Historical and Forecast Dry Etching System Market in Asia & Pacific (2020-2030)
11.1 Dry Etching System Market Size
11.2 Dry Etching System Demand by End Use
11.3 Competition by Players/Suppliers
11.4 Type Segmentation and Price
11.5 Key Countries Analysis
11.5.1 China
11.5.2 India
11.5.3 Japan
11.5.4 South Korea
11.5.5 Southest Asia
11.5.6 Australia
Chapter 12 Historical and Forecast Dry Etching System Market in Europe (2020-2030)
12.1 Dry Etching System Market Size
12.2 Dry Etching System Demand by End Use
12.3 Competition by Players/Suppliers
12.4 Type Segmentation and Price
12.5 Key Countries Analysis
12.5.1 Germany
12.5.2 France
12.5.3 United Kingdom
12.5.4 Italy
12.5.5 Spain
12.5.6 Belgium
12.5.7 Netherlands
12.5.8 Austria
12.5.9 Poland
12.5.10 Russia
Chapter 13 Historical and Forecast Dry Etching System Market in MEA (2020-2030)
13.1 Dry Etching System Market Size
13.2 Dry Etching System Demand by End Use
13.3 Competition by Players/Suppliers
13.4 Type Segmentation and Price
13.5 Key Countries Analysis
13.5.1 Egypt
13.5.2 Israel
13.5.3 South Africa
13.5.4 Gulf Cooperation Council Countries
13.5.5 Turkey
Chapter 14 Summary For Global Dry Etching System Market (2020-2025)
14.1 Dry Etching System Market Size
14.2 Dry Etching System Demand by End Use
14.3 Competition by Players/Suppliers
14.4 Type Segmentation and Price
Chapter 15 Global Dry Etching System Market Forecast (2025-2030)
15.1 Dry Etching System Market Size Forecast
15.2 Dry Etching System Demand Forecast
15.3 Competition by Players/Suppliers
15.4 Type Segmentation and Price Forecast
Chapter 16 Analysis of Global Key Vendors
16.1 Lam Research
16.1.1 Company Profile
16.1.2 Main Business and Dry Etching System Information
16.1.3 SWOT Analysis of Lam Research
16.1.4 Lam Research Dry Etching System Sales, Revenue, Price and Gross Margin (2020-2025)
16.2 Applied Materials Inc.
16.2.1 Company Profile
16.2.2 Main Business and Dry Etching System Information
16.2.3 SWOT Analysis of Applied Materials Inc.
16.2.4 Applied Materials Inc. Dry Etching System Sales, Revenue, Price and Gross Margin (2020-2025)
16.3 Tokyo Electron Ltd.
16.3.1 Company Profile
16.3.2 Main Business and Dry Etching System Information
16.3.3 SWOT Analysis of Tokyo Electron Ltd.
16.3.4 Tokyo Electron Ltd. Dry Etching System Sales, Revenue, Price and Gross Margin (2020-2025)
16.4 Hitachi
16.4.1 Company Profile
16.4.2 Main Business and Dry Etching System Information
16.4.3 SWOT Analysis of Hitachi
16.4.4 Hitachi Dry Etching System Sales, Revenue, Price and Gross Margin (2020-2025)
16.5 ULVAC
16.5.1 Company Profile
16.5.2 Main Business and Dry Etching System Information
16.5.3 SWOT Analysis of ULVAC
16.5.4 ULVAC Dry Etching System Sales, Revenue, Price and Gross Margin (2020-2025)
16.6 Canon Anelva
16.6.1 Company Profile
16.6.2 Main Business and Dry Etching System Information
16.6.3 SWOT Analysis of Canon Anelva
16.6.4 Canon Anelva Dry Etching System Sales, Revenue, Price and Gross Margin (2020-2025)
16.7 AMEC
16.7.1 Company Profile
16.7.2 Main Business and Dry Etching System Information
16.7.3 SWOT Analysis of AMEC
16.7.4 AMEC Dry Etching System Sales, Revenue, Price and Gross Margin (2020-2025)
16.8 NAURA
16.8.1 Company Profile
16.8.2 Main Business and Dry Etching System Information
16.8.3 SWOT Analysis of NAURA
16.8.4 NAURA Dry Etching System Sales, Revenue, Price and Gross Margin (2020-2025)
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Tables and Figures
Table Abbreviation and Acronyms List
Table Research Scope of Dry Etching System Report
Table Data Sources of Dry Etching System Report
Table Major Assumptions of Dry Etching System Report
Figure Market Size Estimated Method
Figure Major Forecasting Factors
Figure Dry Etching System Picture
Table Dry Etching System Classification
Table Dry Etching System Applications List
Table Drivers of Dry Etching System Market
Table Restraints of Dry Etching System Market
Table Opportunities of Dry Etching System Market
Table Threats of Dry Etching System Market
Table Covid-19 Impact For Dry Etching System Market
Table Raw Materials Suppliers List
Table Different Production Methods of Dry Etching System
Table Cost Structure Analysis of Dry Etching System
Table Key End Users List
Table Latest News of Dry Etching System Market
Table Merger and Acquisition List
Table Planned/Future Project of Dry Etching System Market
Table Policy of Dry Etching System Market
Table 2020-2030 Regional Export of Dry Etching System
Table 2020-2030 Regional Import of Dry Etching System
Table 2020-2030 Regional Trade Balance
Figure 2020-2030 Regional Trade Balance
Table 2020-2030 North America Dry Etching System Market Size and Market Volume List
Figure 2020-2030 North America Dry Etching System Market Size and CAGR
Figure 2020-2030 North America Dry Etching System Market Volume and CAGR
Table 2020-2030 North America Dry Etching System Demand List by Application
Table 2020-2025 North America Dry Etching System Key Players Sales List
Table 2020-2025 North America Dry Etching System Key Players Market Share List
Table 2020-2030 North America Dry Etching System Demand List by Type
Table 2020-2025 North America Dry Etching System Price List by Type
Table 2020-2030 United States Dry Etching System Market Size and Market Volume List
Table 2020-2030 United States Dry Etching System Import & Export List
Table 2020-2030 Canada Dry Etching System Market Size and Market Volume List
Table 2020-2030 Canada Dry Etching System Import & Export List
Table 2020-2030 Mexico Dry Etching System Market Size and Market Volume List
Table 2020-2030 Mexico Dry Etching System Import & Export List
Table 2020-2030 South America Dry Etching System Market Size and Market Volume List
Figure 2020-2030 South America Dry Etching System Market Size and CAGR
Figure 2020-2030 South America Dry Etching System Market Volume and CAGR
Table 2020-2030 South America Dry Etching System Demand List by Application
Table 2020-2025 South America Dry Etching System Key Players Sales List
Table 2020-2025 South America Dry Etching System Key Players Market Share List
Table 2020-2030 South America Dry Etching System Demand List by Type
Table 2020-2025 South America Dry Etching System Price List by Type
Table 2020-2030 Brazil Dry Etching System Market Size and Market Volume List
Table 2020-2030 Brazil Dry Etching System Import & Export List
Table 2020-2030 Argentina Dry Etching System Market Size and Market Volume List
Table 2020-2030 Argentina Dry Etching System Import & Export List
Table 2020-2030 Chile Dry Etching System Market Size and Market Volume List
Table 2020-2030 Chile Dry Etching System Import & Export List
Table 2020-2030 Peru Dry Etching System Market Size and Market Volume List
Table 2020-2030 Peru Dry Etching System Import & Export List
Table 2020-2030 Asia & Pacific Dry Etching System Market Size and Market Volume List
Figure 2020-2030 Asia & Pacific Dry Etching System Market Size and CAGR
Figure 2020-2030 Asia & Pacific Dry Etching System Market Volume and CAGR
Table 2020-2030 Asia & Pacific Dry Etching System Demand List by Application
Table 2020-2025 Asia & Pacific Dry Etching System Key Players Sales List
Table 2020-2025 Asia & Pacific Dry Etching System Key Players Market Share List
Table 2020-2030 Asia & Pacific Dry Etching System Demand List by Type
Table 2020-2025 Asia & Pacific Dry Etching System Price List by Type
Table 2020-2030 China Dry Etching System Market Size and Market Volume List
Table 2020-2030 China Dry Etching System Import & Export List
Table 2020-2030 India Dry Etching System Market Size and Market Volume List
Table 2020-2030 India Dry Etching System Import & Export List
Table 2020-2030 Japan Dry Etching System Market Size and Market Volume List
Table 2020-2030 Japan Dry Etching System Import & Export List
Table 2020-2030 South Korea Dry Etching System Market Size and Market Volume List
Table 2020-2030 South Korea Dry Etching System Import & Export List
Table 2020-2030 Southeast Asia Dry Etching System Market Size List
Table 2020-2030 Southeast Asia Dry Etching System Market Volume List
Table 2020-2030 Southeast Asia Dry Etching System Import List
Table 2020-2030 Southeast Asia Dry Etching System Export List
Table 2020-2030 Australia Dry Etching System Market Size and Market Volume List
Table 2020-2030 Australia Dry Etching System Import & Export List
Table 2020-2030 Europe Dry Etching System Market Size and Market Volume List
Figure 2020-2030 Europe Dry Etching System Market Size and CAGR
Figure 2020-2030 Europe Dry Etching System Market Volume and CAGR
Table 2020-2030 Europe Dry Etching System Demand List by Application
Table 2020-2025 Europe Dry Etching System Key Players Sales List
Table 2020-2025 Europe Dry Etching System Key Players Market Share List
Table 2020-2030 Europe Dry Etching System Demand List by Type
Table 2020-2025 Europe Dry Etching System Price List by Type
Table 2020-2030 Germany Dry Etching System Market Size and Market Volume List
Table 2020-2030 Germany Dry Etching System Import & Export List
Table 2020-2030 France Dry Etching System Market Size and Market Volume List
Table 2020-2030 France Dry Etching System Import & Export List
Table 2020-2030 United Kingdom Dry Etching System Market Size and Market Volume List
Table 2020-2030 United Kingdom Dry Etching System Import & Export List
Table 2020-2030 Italy Dry Etching System Market Size and Market Volume List
Table 2020-2030 Italy Dry Etching System Import & Export List
Table 2020-2030 Spain Dry Etching System Market Size and Market Volume List
Table 2020-2030 Spain Dry Etching System Import & Export List
Table 2020-2030 Belgium Dry Etching System Market Size and Market Volume List
Table 2020-2030 Belgium Dry Etching System Import & Export List
Table 2020-2030 Netherlands Dry Etching System Market Size and Market Volume List
Table 2020-2030 Netherlands Dry Etching System Import & Export List
Table 2020-2030 Austria Dry Etching System Market Size and Market Volume List
Table 2020-2030 Austria Dry Etching System Import & Export List
Table 2020-2030 Poland Dry Etching System Market Size and Market Volume List
Table 2020-2030 Poland Dry Etching System Import & Export List
Table 2020-2030 Russia Dry Etching System Market Size and Market Volume List
Table 2020-2030 Russia Dry Etching System Import & Export List
Table 2020-2030 MEA Dry Etching System Market Size and Market Volume List
Figure 2020-2030 MEA Dry Etching System Market Size and CAGR
Figure 2020-2030 MEA Dry Etching System Market Volume and CAGR
Table 2020-2030 MEA Dry Etching System Demand List by Application
Table 2020-2025 MEA Dry Etching System Key Players Sales List
Table 2020-2025 MEA Dry Etching System Key Players Market Share List
Table 2020-2030 MEA Dry Etching System Demand List by Type
Table 2020-2025 MEA Dry Etching System Price List by Type
Table 2020-2030 Egypt Dry Etching System Market Size and Market Volume List
Table 2020-2030 Egypt Dry Etching System Import & Export List
Table 2020-2030 Israel Dry Etching System Market Size and Market Volume List
Table 2020-2030 Israel Dry Etching System Import & Export List
Table 2020-2030 South Africa Dry Etching System Market Size and Market Volume List
Table 2020-2030 South Africa Dry Etching System Import & Export List
Table 2020-2030 Gulf Cooperation Council Countries Dry Etching System Market Size and Market Volume List
Table 2020-2030 Gulf Cooperation Council Countries Dry Etching System Import & Export List
Table 2020-2030 Turkey Dry Etching System Market Size and Market Volume List
Table 2020-2030 Turkey Dry Etching System Import & Export List
Table 2020-2025 Global Dry Etching System Market Size List by Region
Table 2020-2025 Global Dry Etching System Market Size Share List by Region
Table 2020-2025 Global Dry Etching System Market Volume List by Region
Table 2020-2025 Global Dry Etching System Market Volume Share List by Region
Table 2020-2025 Global Dry Etching System Demand List by Application
Table 2020-2025 Global Dry Etching System Demand Market Share List by Application
Table 2020-2025 Global Dry Etching System Key Vendors Sales List
Table 2020-2025 Global Dry Etching System Key Vendors Sales Share List
Figure 2020-2025 Global Dry Etching System Market Volume and Growth Rate
Table 2020-2025 Global Dry Etching System Key Vendors Revenue List
Figure 2020-2025 Global Dry Etching System Market Size and Growth Rate
Table 2020-2025 Global Dry Etching System Key Vendors Revenue Share List
Table 2020-2025 Global Dry Etching System Demand List by Type
Table 2020-2025 Global Dry Etching System Demand Market Share List by Type
Table 2020-2025 Regional Dry Etching System Price List
Table 2025-2030 Global Dry Etching System Market Size List by Region
Table 2025-2030 Global Dry Etching System Market Size Share List by Region
Table 2025-2030 Global Dry Etching System Market Volume List by Region
Table 2025-2030 Global Dry Etching System Market Volume Share List by Region
Table 2025-2030 Global Dry Etching System Demand List by Application
Table 2025-2030 Global Dry Etching System Demand Market Share List by Application
Table 2025-2030 Global Dry Etching System Key Vendors Sales List
Table 2025-2030 Global Dry Etching System Key Vendors Sales Share List
Figure 2025-2030 Global Dry Etching System Market Volume and Growth Rate
Table 2025-2030 Global Dry Etching System Key Vendors Revenue List
Figure 2025-2030 Global Dry Etching System Market Size and Growth Rate
Table 2025-2030 Global Dry Etching System Key Vendors Revenue Share List
Table 2025-2030 Global Dry Etching System Demand List by Type
Table 2025-2030 Global Dry Etching System Demand Market Share List by Type
Table 2025-2030 Dry Etching System Regional Price List
Table Lam Research Information
Table SWOT Analysis of Lam Research
Table 2020-2025 Lam Research Dry Etching System Sale Volume Price Cost Revenue
Figure 2020-2025 Lam Research Dry Etching System Sale Volume and Growth Rate
Figure 2020-2025 Lam Research Dry Etching System Market Share
Table Applied Materials Inc. Information
Table SWOT Analysis of Applied Materials Inc.
Table 2020-2025 Applied Materials Inc. Dry Etching System Sale Volume Price Cost Revenue
Figure 2020-2025 Applied Materials Inc. Dry Etching System Sale Volume and Growth Rate
Figure 2020-2025 Applied Materials Inc. Dry Etching System Market Share
Table Tokyo Electron Ltd. Information
Table SWOT Analysis of Tokyo Electron Ltd.
Table 2020-2025 Tokyo Electron Ltd. Dry Etching System Sale Volume Price Cost Revenue
Figure 2020-2025 Tokyo Electron Ltd. Dry Etching System Sale Volume and Growth Rate
Figure 2020-2025 Tokyo Electron Ltd. Dry Etching System Market Share
Table Hitachi Information
Table SWOT Analysis of Hitachi
Table 2020-2025 Hitachi Dry Etching System Sale Volume Price Cost Revenue
Figure 2020-2025 Hitachi Dry Etching System Sale Volume and Growth Rate
Figure 2020-2025 Hitachi Dry Etching System Market Share
Table ULVAC Information
Table SWOT Analysis of ULVAC
Table 2020-2025 ULVAC Dry Etching System Sale Volume Price Cost Revenue
Figure 2020-2025 ULVAC Dry Etching System Sale Volume and Growth Rate
Figure 2020-2025 ULVAC Dry Etching System Market Share
Table Canon Anelva Information
Table SWOT Analysis of Canon Anelva
Table 2020-2025 Canon Anelva Dry Etching System Sale Volume Price Cost Revenue
Figure 2020-2025 Canon Anelva Dry Etching System Sale Volume and Growth Rate
Figure 2020-2025 Canon Anelva Dry Etching System Market Share
Table AMEC Information
Table SWOT Analysis of AMEC
Table 2020-2025 AMEC Dry Etching System Sale Volume Price Cost Revenue
Figure 2020-2025 AMEC Dry Etching System Sale Volume and Growth Rate
Figure 2020-2025 AMEC Dry Etching System Market Share
Table NAURA Information
Table SWOT Analysis of NAURA
Table 2020-2025 NAURA Dry Etching System Sale Volume Price Cost Revenue
Figure 2020-2025 NAURA Dry Etching System Sale Volume and Growth Rate
Figure 2020-2025 NAURA Dry Etching System Market Share

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