Global PVD and ALD Coating for Chamber Components Market Growth (Status and Outlook) 2024-2030
PVD and ALD coatings for chamber components are typically based on yttrium or aluminum oxides or may be made from aluminum oxynitride (AlON). The exact chemistry and coating thickness must be tailored to the application. The use of temperature in the chamber, processing time, and gases vary considerably depending on the device specifications, and these variables are used to select the right combination of coatings for their desired coating performance. Custom precision-engineered coatings provide the optimal balance between cost and performance. Deposition chambers contain various parts and components that either contact the device wafer directly or are exposed to process chemicals that subsequently reach the wafer. As such, material selection is critical. The corrosive chemicals used in plasma-etch chambers attack the tool component surfaces and degrade coatings. Longer exposure to hotter plasmas, which is common for 3D device processing, accelerates degradation. Particles shed from the corroded surfaces then deposit on the wafers, potentially causing device failure. Components protected with yttrium oxide deposited by plasma spray-coating or made from anodized aluminum have long been the industry norm. Although such solutions have worked for many years, the nano-scale features of advanced process nodes demand an increased level of cleanliness for every part in the system. Conventionally coated components are not rugged enough to withstand the aggressive environments inside etch and deposition chambers without impacting device yield. Plasma spray coatings are relatively rough and porous, while anodized coatings exhibit in-situ cracking that makes them degrade too readily. The complex shapes of parts inside deposition chambers also pose a challenge for spray coating, which works best when coating planar surfaces. Precision engineered, specialized coatings borrow vacuum thin film technologies associated with semiconductor wafer processing to produce coated components that can better resist the corrosion and oxidation that degrade conventional coatings. Two options are available: physical vapor deposition (PVD) and atomic layer deposition (ALD). Every precision engineered coating must exhibit a minimum level of wear and corrosion resistance in the presence of corrosive plasma/chemistry and adhere fully to the underlying substrate to create a uniformly coated surface. The geometry and material of the part being coated, the type of chamber, and the processing conditions further dictate the optimal coating chemistry and method.
The global PVD and ALD Coating for Chamber Components market size is projected to grow from US$ 52.6 million in 2024 to US$ 90.6 million in 2030; it is expected to grow at a CAGR of 9.5% from 2024 to 2030.
LPI (LP Information)' newest research report, the “PVD and ALD Coating for Chamber Components Industry Forecast” looks at past sales and reviews total world PVD and ALD Coating for Chamber Components sales in 2022, providing a comprehensive analysis by region and market sector of projected PVD and ALD Coating for Chamber Components sales for 2023 through 2029. With PVD and ALD Coating for Chamber Components sales broken down by region, market sector and sub-sector, this report provides a detailed analysis in US$ millions of the world PVD and ALD Coating for Chamber Components industry.
This Insight Report provides a comprehensive analysis of the global PVD and ALD Coating for Chamber Components landscape and highlights key trends related to product segmentation, company formation, revenue, and market share, latest development, and M&A activity. This report also analyses the strategies of leading global companies with a focus on PVD and ALD Coating for Chamber Components portfolios and capabilities, market entry strategies, market positions, and geographic footprints, to better understand these firms’ unique position in an accelerating global PVD and ALD Coating for Chamber Components market.
This Insight Report evaluates the key market trends, drivers, and affecting factors shaping the global outlook for PVD and ALD Coating for Chamber Components and breaks down the forecast by Coating Method, by Application, geography, and market size to highlight emerging pockets of opportunity. With a transparent methodology based on hundreds of bottom-up qualitative and quantitative market inputs, this study forecast offers a highly nuanced view of the current state and future trajectory in the global PVD and ALD Coating for Chamber Components.
Global key players of PVD and ALD Coating for Chamber Components include Entegris, KoMiCo, Inficon, etc. The top three players hold a share about 50%. Asia-Pacific is the largest market, and has a share about 58%, followed by North America and Europe with share 35% and 7%, separately. In terms of Coating Method, PVD Coating Method is the largest segment, accounting for a share of 65%. In terms of application, Etching Tools is the largest field with a share about 86 percent.
This report presents a comprehensive overview, market shares, and growth opportunities of PVD and ALD Coating for Chamber Components market by product type, application, key players and key regions and countries.
Segmentation by Coating Method:
PVD Coating Method
ALD Coating Method
Segmentation by Application:
Etching Tools
Deposition Tools
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
Segmentation by Coating Method:
PVD Coating Method
ALD Coating Method
Segmentation by Application:
Etching Tools
Deposition Tools
This report also splits the market by region:
Americas
United States
Canada
Mexico
Brazil
APAC
China
Japan
Korea
Southeast Asia
India
Australia
Europe
Germany
France
UK
Italy
Russia
Middle East & Africa
Egypt
South Africa
Israel
Turkey
GCC Countries
The below companies that are profiled have been selected based on inputs gathered from primary experts and analyzing the company's coverage, product portfolio, its market penetration.
TOCALO Co., Ltd.
KoMiCo
Cinos
WONIK QnC
Oerlikon Balzers
Beneq
Entegris
Inficon
Please note: The report will take approximately 2 business days to prepare and deliver.